Neutral atoms are a promising platform for scalable quantum computing, however prior demonstration of high fidelity gates or low-loss readout methods have employed restricted numbers of qubits. Using randomized benchmarking of microwave-driven single-qubit gates, we demonstrate average gate errors of 7(2) × 10−5 on a 225 site atom array using conventional, destructive readout. We further demonstrate a factor of 1.7 suppression of the primary measurement errors via low-loss, non-destructive and state-selective readout on 49 sites whilst achieving gate errors of 2(9) × 10−4.